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LIGHT WAVE SEPARATION LATTICES AND METHODS OF FORMING LIGHT WAVE SEPARATION LATTICES
LIGHT WAVE SEPARATION LATTICES AND METHODS OF FORMING LIGHT WAVE SEPARATION LATTICES
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机译:光波分离格和形成光波分离格的方法
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摘要
Light wave separation lattices and methods of formation are provided herein. In some embodiments, a light wave separation lattice includes a first layer having the formula ROxNy, wherein the first layer has a first refractive index; and a second layer, different from the first layer, disposed atop the first layer, and having the formula R′OxNy, wherein the second layer has a second refractive index different from the first refractive index, and wherein R and R′ are each one of a metal or a dielectric material. In some embodiments, a method of forming a light wave separation lattice includes depositing a first layer having a predetermined desired refractive index atop a substrate by a physical vapor deposition process; and depositing a second layer, different from the first layer, atop the first layer, wherein the second layer has a predetermined second refractive index different from the first refractive index.
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机译:本文提供了光波分离晶格及其形成方法。在一些实施例中,光波分离晶格包括具有式RO x Sub> N y Sub>的第一层,其中第一层具有第一折射率;第二层,与第一层不同,设置在第一层的顶部,具有式R'O x Sub> N y Sub>,其中第二层具有第二折射层。折射率不同于第一折射率,并且其中R和R'各自是金属或介电材料中的一个。在一些实施例中,一种形成光波分离晶格的方法包括通过物理气相沉积工艺将具有预定期望折射率的第一层沉积在基板上。在第一层上沉积不同于第一层的第二层,其中第二层具有不同于第一折射率的预定第二折射率。
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