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Advanced e-Fuse structure with hybrid metal controlled microstructure
Advanced e-Fuse structure with hybrid metal controlled microstructure
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机译:先进的电子熔丝结构,具有混合金属控制的微结构
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摘要
A structure of an e-Fuse device in a semiconductor device is described. The e-Fuse device includes an anode region, a cathode region and a fuse element which interconnects the anode and cathode regions in a dielectric material on a first surface of a substrate. The fuse element has a smaller cross section and a higher aspect ratio than the anode and cathode regions. The anode and cathode regions are comprised of a large grained copper layer and an aspect ratio reducing layer, and the fuse element is comprised of a fine grained copper structure.
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