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THERMAL POLING METHOD, PIEZOELECTRIC FILM AND MANUFACTURING METHOD OF SAME, THERMAL POLING APPARATUS, AND INSPECTION METHOD OF PIEZOELECTRIC PROPERTY
THERMAL POLING METHOD, PIEZOELECTRIC FILM AND MANUFACTURING METHOD OF SAME, THERMAL POLING APPARATUS, AND INSPECTION METHOD OF PIEZOELECTRIC PROPERTY
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机译:相同的热极化方法,压电薄膜和制造方法,热极化装置以及压电性能的检查方法
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摘要
A thermal poling method in which a poling treatment can be performed easily by a dry process. The poling treatment is performed on a PZT film by performing a heat treatment on the PZT film under a pressurized oxygen atmosphere at a temperature of 400° C. or more and 900° C. or less. The PZT film before the heat treatment has a single-domain crystal structure, and the PZT film after the heat treatment has a multi-domain crystal structure.
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