THERMAL TYPE FLOW METER, FLOW RATE PROCESSING DEVICE, AND THERMAL TYPE FLOW RATE MEASUREMENT METHOD

摘要

A thermal type flow meter includes a first resistor (R1) which is disposed along a flow path through which a fluid flows, generates heat when a current is applied, and outputs a first output signal indicating a heat generation temperature, a second resistor (R2) which is disposed at a position different from that of the first resistor along the flow path and outputs a second output signal indicating a temperature of the fluid, and a current application unit configured to apply a current to the first resistor so that the first output signal indicates a predetermined temperature. A parameter for converting the difference between the first output signal and the second output signal when a predetermined input is received if the current is applied into a target value is determined. The flow rate is acquired using the parameter, the difference detected after the parameter is determined, and a predetermined function.