首页> 外国专利> MEASURING DEVICE AND METHOD FOR MEASURING AT LEAST ONE LENGTH MEASURAND

MEASURING DEVICE AND METHOD FOR MEASURING AT LEAST ONE LENGTH MEASURAND

机译:至少一个长度测量值的测量装置和测量方法

摘要

The invention relates to a measuring device (10) and a method for determining a length measurand of a workpiece. A carrier part (13), on which a probe unit (18) is arranged immovably in a first spatial direction (x), can be moved or positioned by means of a positioning arrangement (12). At least one laser interferometer (24) is connected to the carrier part (13) immovably in the first spatial direction (x). By means of a first laser measuring beam (L1) and a second laser measuring beam (L2), the laser interferometer (24) generates a first measurement signal (S1), which measurement signal describes the distance of the laser interferometer (24) from a first reflector (25) in the first spatial direction (x), and a second measurement signal (S2), which describes the distance of the laser interferometer (24) from a second reflector (26) in the first spatial direction (x). A probe system plane (E), which is immovable in the first spatial direction (x) relative to the carrier part (13) or the probe unit (18) and which extends at right angles to this first spatial direction (x), therefore has a position in the first spatial direction (x) that can be determined by means of the distances of the laser interferometer (24) from the first reflector (25) and the second reflector (26).
机译:本发明涉及一种测量装置( 10 )和一种用于确定工件的长度测量值的方法。可以通过以下方式移动或定位承载部件( 13 ),在该承载部件上沿第一空间方向(x)不可移动地布置探针单元( 18 )。定位安排( 12 )。至少一个激光干涉仪( 24 )在第一空间方向(x)上不可移动地连接到载体部件( 13 )。通过第一激光测量光束(L 1 )和第二激光测量光束(L 2 ),激光干涉仪( 24 )产生第一测量信号(S1),该测量信号描述了激光干涉仪( 24 )在第一空间方向(x)上与第一反射镜( 25 )的距离)和第二测量信号(S 2 ),该信号描述了激光干涉仪( 24 )与第二反射镜( 26 )在第一个空间方向(x)上。探针系统平面(E),它在相对于载体部件( 13 )或探针单元( 18 )的第一空间方向(x)上不可移动,并且与该第一空间方向(x)成直角的延伸,因此在第一空间方向(x)上具有一个位置,该位置可以通过激光干涉仪( 24 )与第一反射器( 25 )和第二反射器( 26 )。

著录项

  • 公开/公告号US2018202796A1

    专利类型

  • 公开/公告日2018-07-19

    原文格式PDF

  • 申请/专利权人 CARL MAHR HOLDING GMBH;

    申请/专利号US201815874217

  • 发明设计人 RAINER ZIEGENBEIN;

    申请日2018-01-18

  • 分类号G01B11/02;G01B9/02;

  • 国家 US

  • 入库时间 2022-08-21 13:00:24

相似文献

  • 专利
  • 外文文献
  • 中文文献
获取专利

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号