A method for the determination and compensation of geometric imaging errors which occur during the imaging of an object by sequential single or multispot scanning by means of a microscopic imaging system, which includes:establishing a reference object with a defined plane structure;generating an electronic image data set of this structure free of geometric imaging errors;generating at least one electronic actual image data set with the imaging system;comparing the actual image data set with the reference image data set with respect to the locations of those pixels which have the same object point as origin in each case;determining location deviations in the actual image data set compared to the reference image data set;saving determined location deviations as correction data; andcompensating for the geometric imaging errors by correction of the location deviations in the actual image data set with reference to the correction data.展开▼
