首页> 外国专利> LIQUID EJECTING HEAD CHIP, LIQUID EJECTING HEAD, LIQUID EJECTING APPARATUS, AND MANUFACTURING METHOD OF LIQUID EJECTING HEAD CHIP

LIQUID EJECTING HEAD CHIP, LIQUID EJECTING HEAD, LIQUID EJECTING APPARATUS, AND MANUFACTURING METHOD OF LIQUID EJECTING HEAD CHIP

机译:液体喷射头芯片,液体喷射头,液体喷射装置以及液体喷射头芯片的制造方法

摘要

Channel grooves for a discharge channel and a non-discharge channel are formed in the surface of an actuator plate by cutting. The discharge channel includes an extension portion and a raise-and-cut portion, and the non-discharge channel also includes an extension portion and a raise-and-cut portion. In an embodiment, an electrode clearance groove is formed in advance by cutting with a dicing blade or the like. After the electrode clearance groove is formed, an electrode is formed by plating. Since plating is performed after the electrode clearance groove is formed, a clearance groove electrode is integrally formed with an AP-side common pad in the electrode clearance groove, and thus the clearance groove electrode and the AP-side common pad are short-circuited. Thus, an electrode separation portion is formed by cutting a short-circuited portion of the clearance groove electrode and the AP-side common pad through cutting or irradiation with laser.
机译:通过切割在致动器板的表面上形成用于排出通道和不排出通道的通道槽。排放通道包括延伸部分和升高和切除部分,并且非排放通道还包括延伸部分和升高和切除部分。在一个实施例中,预先通过用划片刀等切割形成电极间隙槽。在形成电极间隙槽之后,通过电镀形成电极。由于在形成电极间隙槽之后进行镀覆,因此在电极间隙槽中将间隙槽电极与AP侧公共焊盘一体地形成,从而使间隙槽电极与AP侧公共焊盘短路。因此,通过通过切割或用激光照射来切割间隙凹槽电极和AP侧公共焊盘的短路部分来形成电极分离部分。

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