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METHOD FOR DETECTING COORDINATES, COORDINATE OUTPUT DEVICE AND DEFECT INSPECTION DEVICE
METHOD FOR DETECTING COORDINATES, COORDINATE OUTPUT DEVICE AND DEFECT INSPECTION DEVICE
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机译:坐标,坐标输出设备和缺陷检查设备的检测方法
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摘要
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摘要
A method for detecting coordinates includes detecting a first position in an inspection target placed on a placement surface of an inspection stage and a second position in the inspection target separated from the first position. A coordinate shift from the first position to the second position includes a first shift component in a first direction taken along the placement surface, and a second shift component in a second direction taken along the placement surface and crossing the first direction. The method further includes calculating a coordinate in the first direction of the second position using a first function, the first function including the first shift component and the second shift component as variables; and calculating a coordinate in the second direction of the second position using a second function, the second function including the first shift component and the second shift component as variables.
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