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Device for detecting chemical/physical phenomenon having a diffusion layer formed between an input charge control region and a sensing region on a substrate
Device for detecting chemical/physical phenomenon having a diffusion layer formed between an input charge control region and a sensing region on a substrate
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机译:用于检测化学/物理现象的装置,具有在基板上的输入电荷控制区和感测区之间形成的扩散层
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摘要
Provided is a charge-transfer-type sensor suitable for high integration while eliminating a potential barrier. A sensor provided with a semiconductor substrate 10 partitioned into a sensing region 5 in which a potential varies in corresponding fashion to a variation in the external environment, a charge input region 2 for supplying charges to the sensing region 5, an input charge control region 3 interposed between the sensing region 5 and the charge input region 2, and a charge accumulation region 7 for accumulating electric charges transported from the sensing region 5, the sensor for detecting the amount of electric charges accumulated in the charge accumulation region 7, wherein a diffusion layer 4 is formed between the input charge control region 3 and the sensing region 5 of the substrate 10, and dopants for producing charges having the same polarity as the charges supplied from the charge input region 2 are diffused in the diffusion layer 4. 展开▼