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ACCELERATION SENSOR, GEOPHONE, AND SEISMIC PROSPECTING SYSTEM
ACCELERATION SENSOR, GEOPHONE, AND SEISMIC PROSPECTING SYSTEM
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机译:加速度传感器,地理电话和地震勘探系统
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摘要
Provided are acceleration sensor, geophone and seismic prospecting system with high sensitivity and low power consumption. The acceleration sensor includes a mass body displaceable with respect to a rotation shaft. The acceleration sensor includes a first AC servo control facing a first symmetrical region of the first movable portion, a second AC servo control electrode facing a second symmetrical region of the second movable portion, and a DC servo control electrode facing an asymmetrical region of the second movable portion. A first AC servo capacitive element is formed by the first movable portion and the first AC servo control electrode, a second AC servo capacitive element is formed by the second movable portion and the second AC servo control electrode, and a DC servo capacitive element is formed by the second movable portion and the DC servo control electrode.
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