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Method for analyzing evolved gas and evolved gas analyzer

机译:析气分析方法及析气分析仪

摘要

Disclosed herein is a method for analyzing evolved gas and an evolved gas analyzer, the method correcting detection sensitivity differences in analysis devices, day-to-day variations thereof, thereby quantifying a measurement target with high accuracy. The method for analyzing evolved gas of the apparatus including: a sample holder; a heating unit evolving a gas component; an ion source generating ions by ionizing the gas component; a mass spectrometer detecting the gas component; and a gas channel through which mixed gas flows, the method including: operating a discharged flow rate controlling process of controlling a flow rate of the mixed gas discharged to outside; operating a sample holder cooling process of cooling the sample holder by bringing the sample holder into contact with a cooling unit; and operating a correction process including: correcting a mass spectrum position; calculating a sensitivity correction factor; and calculating a heating correction factor.
机译:本文公开了一种用于分析逸出气体的方法和一种逸出气体分析器,该方法校正分析装置中的检测灵敏度差异,其日常变化,从而以高精度量化测量目标。该装置的析出气体的分析方法包括:样品架;和释放气体成分的加热单元;通过使气体成分电离而产生离子的离子源;质谱仪检测气体成分;所述方法包括:操作排出流量控制过程,以控制排出到外部的混合气体的流量;以及通过使样品架与冷却单元接触来操作样品架冷却过程以冷却样品架;校正步骤包括:校正质谱位置;以及计算灵敏度校正因子;计算加热校正因子。

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