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DEVICE FOR DELAMINATING LAMINATE, DELAMINATION METHOD, AND METHOD FOR MANUFACTURING ELECTRONIC DEVICE
DEVICE FOR DELAMINATING LAMINATE, DELAMINATION METHOD, AND METHOD FOR MANUFACTURING ELECTRONIC DEVICE
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机译:用于层叠的装置,分层方法和制造电子装置的方法
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摘要
A movable member is gripped in a delamination-start configuration, and the other-end side of a rib of a delamination member is pressed towards the other-end side of a flexible plate. The flexible plate then warps and deforms about the other end side of the flexible plate, which is supported by a support member, the flexible plate deforming along the direction in which delamination progresses. In concert with the delamination action, a reinforcing plate also warps and deforms along with the flexible plate, the reinforcing plate being vacuum-chucked to an air-permeable electroconductive sheet on the flexible plate, and the reinforcing plate is sequentially delaminated from a substrate 2 along the direction in which delamination progresses.
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