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METHOD FOR DETERMINING THE THRESHOLD ABLATION OF SOLID MATERIALS

机译:测定固体材料的阈值烧蚀的方法

摘要

The invention relates to a method for determining the threshold of laser ablation of solid materials, which finds application in the field of electronics and microelectronics for laser modification of solid surfaces and for deposition of layers of ablated material on different substrates, in laser machine processing. materials, and in scientific studies such as laser-induced plasma spectroscopy, etc. The method consists in irradiating the surface of a solid material with high-energy pulsed laser light and recording the change in the amplitude and shape of the photo-induced electrical signal in the solid material. By raising the irradiation energy and recording a change per saltum in the shape and amplitude of the photoinduced electrical signal from the solid material, the ablation threshold is determined. The change in the shape finds expression in the extension of the photoinduced electrical signal and the appearance of a second component with reversed polarity. The method for determining the threshold of laser ablation of solid materials makes it possible to accurately determine the minimum energy required to begin the ablation process in a particular application concerning the interaction of pulsed laser light with a solid surface.
机译:确定固体材料的激光烧蚀阈值的方法技术领域本发明涉及一种确定固体材料的激光烧蚀阈值的方法,该方法在电子和微电子学领域中用于在激光机器加工中对固体表面进行激光改性以及在不同的基板上沉积烧蚀的材料层中具有应用。该方法包括用高能脉冲激光照射固体材料的表面并记录光感应电信号的幅度和形状的变化。在固体材料中。通过提高辐照能量并记录来自固体材料的光诱导电信号的形状和幅度的每单位盐含量的变化,可以确定烧蚀阈值。形状的变化在光感生电信号的延伸和具有相反极性的第二成分的出现中找到表达。用于确定固体材料的激光烧蚀阈值的方法使得可以精确地确定在涉及脉冲激光与固体表面的相互作用的特定应用中开始烧蚀过程所需的最小能量。

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