A Method of Performance Testing Working Parameters of a Fluid Handling Structure and A Method of Detecting Loss of Immersion Liquid from a Fluid Handing Structure in an Immersion Lithographic Apparatus

摘要

A method of performance testing working parameters of a fluid handing structure in an immersion lithographic apparatus, the method comprising: placing a test substrate comprising an upper surface with a first portion with a resist defining the upper surface and a second portion with a material different from the resist defining the rest of the upper surface on a table in the immersion lithographic apparatus, confining liquid on a region of an upper surface of the table and/or the upper surface of the test substrate by operating the fluid handing structure using the associated working parameters, moving the table such that the regionC moves from the second portion to the first portion; detecting change to and/or residue on the first portion as a result of liquid being left behind on the first portion during the moving.