Method for performing the local charge transient analysis

摘要

Method of implementation of local charge transient analysis by the probe of scanning transient microscope is characterized by the fact that the probe is located and moved in short distance from the imaged surface, at the selected point an appropriate distance of the sensor from the surface is set, and the power supply for controlling the distance of the probe from the surface is switched off, a local charge transient spectroscopic analysis is realized, and subsequently, the power supply of the probe for controlling the distance of probe from the surface switches-on. Reliable analysis of transients is possible by separation of transient current from the current powering the sensor for the control of distance of the probe from the surface, namely by separation of the step of setting the position of the probe from the step of quantity measurement.