gyroscope mim with high stability against the change of temperature and humidity

摘要

A MEMS device including a main die (22) that may be coupled to a secondary die (2), which forms a frame (4), and at least one first mobile mass (6) elastically coupled to the frame, the main die (22) forming: a driving stage (20, 24) that drives the first mobile mass so that it oscillates, parallel to a first direction, with frequency-modulated displacements; and a processing stage (35), which generates an output signal indicating an angular velocity of the MEMS device (100) as a function of displacements parallel to a second direction that are made by the first mobile mass, when driven by the driving stage, on account of a Coriolis force.