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Improving a gas phase reaction in a plasma using ultrasonic acoustic waves high intensity and high power

机译:使用高强度和高功率的超声波改善等离子体中的气相反应

摘要

A method for improving a reaction in gas phase in a plasma, comprising: - creating plasma (104) by at least one plasma source (106), and - generating high power ultrasonic acoustic waves of high intensity and (102) have a predetermined amount of acoustic energy by at least one generator of ultrasonic acoustic waves of high intensity and high power (101), wherein said ultrasonic high intensity and high power acoustic waves are directed to propagate to said plasma (104) so ​​that the least a portion of said predetermined amount of acoustic energy to be absorbed into said plasma (104), and where an acoustic power of said ultrasonic acoustic waves high intensity and high power (102) generated is at least substantially 100 W; characterized in that: - the acoustic wave generator (101) is a gas jet generator of acoustic wave; - a level of sound pressure of the ultrasonic sound waves of high intensity and high power (102) is generated at least substantially 140 dB; and - the ultrasonic sound waves of high intensity and high generated power propagating toward a membrane (401) so that the gases used by the at least one generator of ultrasonic acoustic waves of high intensity and high power (101) are not mixed with one or more gases (111) used by said plasma source (106) for creating said plasma (104).
机译:一种用于改善等离子体中的气相反应的方法,该方法包括:-通过至少一个等离子体源(106)产生等离子体(104);以及-产生具有预定量的高强度的高功率超声波(102)。至少一个高强度和高功率的超声波发生器产生的声能(101),其中所述超声高强度和高功率的声波被定向传播到所述等离子体(104),以便至少一部分预定量的声能被吸收到所述等离子体(104)中,并且所述高强度和高功率的超声波(102)的声功率至少基本上为100W;其特征在于:-声波发生器(101)是声波的气体喷射发生器; -高强度和高功率的超声波的声压水平(102)至少基本上产生140dB; -高强度和高发电功率的超声波朝着膜片(401)传播,以使至少一台高强度高功率的超声波发生器(101)所使用的气体不与一种或多种混合。所述等离子体源(106)使用更多的气体(111)来产生所述等离子体(104)。

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