FLOW RATE CONTROL DEVICE, METHOD OF CALIBRATING FLOW RATE OF FLOW RATE CONTROL DEVICE, FLOW RATE MEASURING DEVICE, AND METHOD OF MEASURING FLOW RATE USING FLOW RATE MEASURING DEVICE

摘要

In a method of calibrating a flow rate control device in which flow rate calibration is performed on the basis of a comparison with a flow rate measured using a flow rate reference apparatus, a prescribed permitted error range is set with respect to a plurality of flow rate settings, and the permitted error range of at least one specific flow rate setting from among the plurality of flow rate settings is set to be smaller than the prescribed permitted error range.