首页> 外国专利> METHODS OF FORMING AN ARRAY COMPRISING PAIRS OF VERTICALLY OPPOSED CAPACITORS AND ARRAYS COMPRISING PAIRS OF VERTICALLY OPPOSED CAPACITORS

METHODS OF FORMING AN ARRAY COMPRISING PAIRS OF VERTICALLY OPPOSED CAPACITORS AND ARRAYS COMPRISING PAIRS OF VERTICALLY OPPOSED CAPACITORS

机译:形成包含垂直对置电容器对的阵列和包含垂直对置电容器对的阵列的方法

摘要

A method of forming an array comprising pairs of vertically opposed capacitors comprises forming an upwardly-open conductive lining in individual capacitor openings in insulative-comprising material. An elevational mid- portion of individual of the conductive linings is removed to form an upper capacitor electrode lining and a lower capacitor electrode lining that are elevationally separate and spaced from one another in the individual capacitor openings. A capacitor insulator is formed radially inward of the upper and lower capacitor electrode linings in the individual capacitor openings. Conductive material is formed radially inward of the capacitor insulator in the individual capacitor openings and elevationally between the capacitor electrode linings. The conductive material is formed to comprise a shared capacitor electrode that is shared by vertically opposed capacitors in individual of the pairs of vertically opposed capacitors. Additional methods and structure independent of method are disclosed.
机译:一种形成包括成对的垂直相对的电容器的阵列的方法,包括在由绝缘材料制成的各个电容器开口中形成向上开口的导电衬里。去除各个导电衬里的高程中间部分,以形成在各个电容器开口中彼此高度分离并彼此隔开的上电容器电极衬里和下电容器电极衬里。电容器绝缘体形成在各个电容器开口中的上部和下部电容器电极衬的径向内侧。导电材料在各个电容器开口中在电容器绝缘子的径向内侧并且在电容器电极衬里之间垂直地形成。导电材料形成为包括共享电容器电极,该共享电容器电极由成对的竖直对置电容器中的竖直对置电容器共享。公开了其他方法和与方法无关的结构。

著录项

  • 公开/公告号WO2018085016A2

    专利类型

  • 公开/公告日2018-05-11

    原文格式PDF

  • 申请/专利权人 MICRON TECHNOLOGY INC.;

    申请/专利号WO2017US56203

  • 发明设计人 RAMASWAMY DURAI VISHAK NIRMAI;

    申请日2017-10-11

  • 分类号H01L27/06;H01L49/02;

  • 国家 WO

  • 入库时间 2022-08-21 12:44:11

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