CONTROL DEVICE, SUBSTRATE INSTALLED IN SAID CONTROL DEVICE, AND VACUUM PUMP TO WHICH SAID CONTROL DEVICE IS APPLIED

摘要

[Problem] To provide: a control device that with a simple heat dissipation structure can reduce costs during component replacement, that can be configured in pumps smaller than pumps have heretofore been, and that is easily manufactured; a substrate installed in said control device; and a vacuum pump to which said control device is applied. [Solution] Installed on one power substrate 21 are a drive current amplifier 5 including a FET for channeling current to an electromagnet 104 or the like of a magnetic bearing, and a drive current amplifier 7 including a FET for channeling current to a three-phase motor 121. Installed on one control substrate 23 are a magnetic bearing floating control 6 comprising a weak current element including a digital circuit and sensor circuit for magnetic bearing floating control, and a weak current element including a digital circuit and sensor circuit needed in a rotational speed control 8 for the motor 121. Because a power element is included only in the power substrate 21, only the power substrate 21 has a short life span and readily breaks down due to heat. The power substrate 21 is fixed to a casing 12 with a heat-dissipating sheet 24 in between.