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A reflector measurement system and method of measuring the reflector using the same
A reflector measurement system and method of measuring the reflector using the same
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机译:反射器测量系统以及使用该反射器测量系统的方法
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摘要
The present invention relates to a reflector measuring system and a reflector measuring method using the same. The reflector measuring system includes: an interferometer for irradiating light in a first direction; a reflector spaced from the interferometer in the first direction; a hologram member positioned between the reflector and the interferometer, and forming a focus region of light irradiated by the interferometer at a peak area of the reflector; an optical fiber spaced apart from the hologram member in the first direction; an optical fiber moving unit for positioning one end of the optical fiber on the focus region of light; and a position measuring unit for measuring the position of one end of the optical fiber.
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