Sensor assembly and method for determining the position of each of a plurality of mirrors in a lithography system

摘要

The present invention is a sensor arrangement for identifying the position of each of a plurality of mirrors (M1 to M6) in a lithography system (100), wherein a plurality of position sensor devices (140) A measurement unit 201 for providing an optical position signal of the position of the mirrors M1 to M6 in the case of exposure by the light source 203, a light source 203 for exposing the measurement unit 201 to the light beam, A detection unit 204 having a plurality of optical detectors 205 for outputting an analog electrical position signal, and a signal processing unit 207, wherein the signal processing unit converts the analog electrical position signal into a digital electrical position signal Wherein at least a light source 203 and a signal processing unit 207 are provided in an integrated component 200 arranged in a vacuum housing 137. The at least one A / Device 140, digital Having an evaluation unit 304 to determine the position of the mirror (M1 to M6), by a group location signal, to a sensor arrangement.