首页> 外国专利> NOZZLE OF INK-JET TYPE APPARATUS FOR REPAIRING DEFECT OF SUBSTRATE AND INK-JET TYPE APPARATUS FOR REPAIRING DEFECT OF SUBSTRATE

NOZZLE OF INK-JET TYPE APPARATUS FOR REPAIRING DEFECT OF SUBSTRATE AND INK-JET TYPE APPARATUS FOR REPAIRING DEFECT OF SUBSTRATE

机译:修复基体缺陷的喷墨式装置的喷嘴和修复基体缺陷的喷墨式装置的喷嘴

摘要

The present invention relates to a nozzle of an ink-jet type substrate defect repair apparatus and an ink-jet type substrate defect repair apparatus. According to the present invention, the nozzle of an ink-jet type substrate defect repair apparatus for repairing a defect region on a substrate by using an ink-jet method comprises: a nozzle unit including a nozzle main body unit extended to have a uniform diameter of a tube, and a nozzle tip unit inclined toward the center from one end of the nozzle main body unit; and an ink supply tube formed in a tubular shape to be apart from the nozzle unit within the nozzle unit, and supplying ink to the nozzle unit.
机译:喷墨型基板缺陷修复装置的喷嘴以及喷墨型基板缺陷修复装置技术领域本发明涉及喷墨型基板缺陷修复装置的喷嘴和喷墨型基板缺陷修复装置。根据本发明,用于通过使用喷墨方法修复基板上的缺陷区域的喷墨型基板缺陷修复装置的喷嘴包括:喷嘴单元,该喷嘴单元包括被延伸为具有均匀直径的喷嘴主体单元。一管子,和从喷嘴主体单元的一端朝中心倾斜的喷嘴头单元。墨供应管形成为管状,以在喷嘴单元内与喷嘴单元分开,并向喷嘴单元供应墨。

著录项

  • 公开/公告号KR20180013122A

    专利类型

  • 公开/公告日2018-02-07

    原文格式PDF

  • 申请/专利权人 BYUN DO YOUNG;

    申请/专利号KR20160096314

  • 发明设计人 BYUN DO YOUNG;

    申请日2016-07-28

  • 分类号H01L21/66;H01L21/67;

  • 国家 KR

  • 入库时间 2022-08-21 12:40:55

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