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DIGITAL X-RAY DETECTOR FOR BLOCKING HYDROGEN
DIGITAL X-RAY DETECTOR FOR BLOCKING HYDROGEN
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机译:数字式X射线检测仪
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摘要
According to the present invention, a digital X-ray detecting apparatus is composed of an oxide semiconductor layer of a thin film transistor and a plurality of interlayer insulating layers disposed on a gate electrode. Additionally, the digital X-ray detecting apparatus is formed to seal the side surface of the oxide semiconductor layer. So, it is possible to effectively prevent hydrogen from penetrating into the oxide semiconductor layer. The interlayer insulating layers are composed of a first interlayer insulating layer and a second interlayer insulating layer thereon.
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