Method and station for measuring contamination of transport boxes for atmospheric transport and storage of substrates

摘要

The invention relates to a method for the contamination measurement of a transport box (2) for atmospheric transport and storage of a substrate (3), characterized in that the concentration of at least one gas species in the transport box (2) 5b and a measuring line 6 connecting at least one gas analyzer 5, 5b to the connector 7 and the connecting device 7 is connected to the connecting line 7 by means of which the measuring line 6 is connected to at least one Characterized in that a gas flow which is arranged to communicate with the inner atmosphere of the transport box (2) and which contains water vapor is supplied to the measuring device. The present invention also relates to a station for contamination measurement of a transport box for atmospheric transport and storage of substrates.