APPARATUS FOR MEASURING COMPONENT CONCENTRATION IN DEVELOPING SOLUTION AND DEVELOPING SOLUTION MANAGEMENT APPARATUS

摘要

An objective of the present invention is to provide a device to measure the concentration of a component, which precisely calculates the concentration of each component, such as an alkali component of a developing solution representing alkalinity, dissolved photoresist, absorbed carbon dioxide, and the like from a characteristic value of the developing solution; and a developing solution management device to maintain and manage developing performance of the developing solution in an optimal condition. To achieve this, according to the present invention, the device to measure a concentration of a component in a developing solution comprises: a measurement unit (1) measuring a plurality of characteristic values of a developing solution having relation with a component concentration of the developing solution repeatedly used and representing alkalinity; a calculation unit (2) calculating the component concentration of the developing solution through a multivariate analysis method based on the characteristic values measured by the measurement unit; and a display unit (DP) displaying any one of the characteristic values measured by the measurement unit (1) and the component concentration calculated by the calculation unit (2).