Methods for cleaning slit valve gate coatings and slit valve gates

摘要

Slit valve gates and methods for cleaning are provided. Slit valves include: a slit valve gate configured to seal an opening in a process chamber; a slit valve gate includes a surface facing a processing volume of the process chamber; And a non-porous anodized coating on the surface of the slit valve gate. Methods of cleaning include: dipping a slit valve gate in a tank containing deionized water; During the first time period, about 6 W / cm²To about 15 W / cm²Ultrasonic treating the slit valve gate at a first power density of about 25 kHz to about 40 kHz; During the second time period, about 30 W / cm²To about 45 W / cm²Ultrasonic treating the slit valve gate at a second power density of about 25 kHz to about 40 kHz; And removing the slit valve gate from the tank.