Process for producing single crystal diamond, single crystal diamond and chemical vapor deposition device used therefor

摘要

A method of manufacturing a single crystal diamond includes a step of forming a protective film on at least a part of a surface of an assisting plate, a step of preparing a diamond seed crystal substrate, a step of disposing a protective film adherent plate having a protective film formed on the assisting plate and a diamond seed crystal substrate in the chamber And a step of growing a single crystal diamond by a chemical vapor deposition method on the main surface of the diamond seed crystal substrate while introducing a gas containing carbon into the chamber.