DRY VACUUM PUMP WITH PURGE GAS SYSTEM AND METHOD OF PURGING

摘要

The present invention, the volume transferred as a dry pump, a plurality of pumping mechanism driven by at least one drive shaft in order to pump the fluid in a row over the pumping stage to the pump outlet in the low vacuum stage from the pump inlet in the high-vacuum stage and a plurality of vacuum pumping stages, each comprising; A lubricant chamber for receiving the bearing assembly of the support to allow rotational movement of the drive shaft, the drive shaft and the lubrication chamber, and extending to the lubrication chamber through the opening of the head plate of the lubrication chamber from the high vacuum stage; As a purge port inter-stage, this gas can be introduced into the pump from the inter-stage position of a downstream side of the high vacuum stage via and the purge port between the can only pass each vacuum pumping stage downstream of the purge port between the stage, the stage Wow; A lubrication chamber purge port located within the lubrication chamber, and this, the purge gas comprises a purge port, said lubricant chamber, to flow from the purge gas source through the purge port inter-stage is connected to the lubrication chamber of the purge gas in the lubricant chamber by controlling the pressure, to provide a pump which prevents the passage of the pumped gas to the lubricant chamber from the vacuum chamber through an opening in the head plate during use.;