The present invention relates to TiO2/ Ag / TiO2More particularly, the present invention relates to a flexible transparent electrode having a multilayer thin film structure, including: an Ag metal layer; And a TiO 2 layer stacked on the upper and lower surfaces of the Ag metal layer,2Layer containing flexible transparent electrode, wherein the thickness of the Ag metal layer is from 11 nm to 25 nm,2And the thickness of the layer is 20 nm to 80 nm.According to the present invention, it is possible to provide a flexible transparent electrode having a high transparency comparable to that of the conventional ITO electrode, having a low sheet resistance, being manufactured by a room temperature deposition process, have.;
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机译:本发明涉及TiO 2 Sub> / Ag / TiO 2 Sub>,更具体地,本发明涉及具有多层薄膜结构的柔性透明电极,包括:Ag金属层;并且,在 2 Sub>含柔性透明电极层的Ag金属层的上表面和下表面上堆叠的TiO 2层,其中Ag金属层的厚度为11nm至25nm, > 2 Sub>,并且层的厚度为20nm至80nm。根据本发明,可以提供具有与常规ITO电极相当的高透明度,具有低透明度的挠性透明电极。具有通过室温沉积工艺制造的薄层电阻。
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