INTEGRATED ABATEMENT SYSTEM FOR COMPLEX WASTE GAS INCLUDING NOx NITROUS OXIDE CHLOROFLUOROCARBONS HYDROCHLOROFLUOROCARBONS HYDROFLUOROCARBONS AND PERFLUOROCOMPOUNDS

摘要

Provided is an integrated treatment system of composite waste gas which includes nitrogen oxides (NO_x, N_2O), chlorofluorocarbons (CFCs), hydrochlorofluorocarbons (HCFCs), hydrofluorocarbons (HFCs), and perfluorinated compounds (PFCs). The system includes: a first wet treatment unit which washes and adsorbs dust including ash, SO_x, and gas dissolved in water; a decomposition reactor which receives waste gas treated in the first wet treatment unit and processes NO_x/N_2O, CFCs, HCFCs, HFCs, and PFCs; and a second wet treatment unit which receives waste gas treated in the decomposition reactor and performs washing and adsorption. The system can efficiently treat a large amount of composite waste gas.