首页> 外国专利> METHOD FOR DETERMINING THE POSITION OF AT LEAST ONE EDGE OF AN OBJECT BY EVALUATING FRESNEL DIFFRACTION BORDER PROFILES

METHOD FOR DETERMINING THE POSITION OF AT LEAST ONE EDGE OF AN OBJECT BY EVALUATING FRESNEL DIFFRACTION BORDER PROFILES

机译:通过评估菲涅耳衍射边界轮廓确定物体至少一个边的位置的方法

摘要

The present invention is a method for determining at least one position of the edge of the object, in particular the strand, the method comprising illuminating the object with light from at least one coherent light source, the diffraction border are caused by the object, , steps that are generated in both the geometric boundaries of the shade, at least one of the spatial intensity profile of the diffraction border at least one single or multi-line (multi line) step of recording, using the optical sensor, at least one of the recorded intensity profile the step shown in the derivative with respect to position, and the square this position axis, and comparing the at least one of the recorded intensity profile at least one reference periodic intensity profile shown in the finely divided, and square with respect to the position where the axis of the object based on the comparison is completed at least the position of one edge It relates to a method, comprising the determining step.;
机译:本发明是一种用于确定物体的边缘,特别是股线的至少一个位置的方法,该方法包括用来自至少一个相干光源的光照射物体,衍射边界是由物体引起的,在阴影的两个几何边界,衍射边界的空间强度轮廓中的至少一个中生成的步骤,至少一个单线或多线(多线)步骤,使用光学传感器记录以下至少一项:记录的强度分布图,将导数相对于位置的步长与该位置轴平方成正比,并将记录的强度分布图的至少一个与细分的至少一个参考周期性强度分布图进行比较,并相对于平方一种方法,其包括基于所述比较的对象,所述对象的轴基于所述比较而完成的位置至少是一个边缘的位置。

著录项

  • 公开/公告号KR101833396B1

    专利类型

  • 公开/公告日2018-02-28

    原文格式PDF

  • 申请/专利权人 시코라 아게;

    申请/专利号KR20157015226

  • 发明设计人 시코라 해럴드;블롬 워너;

    申请日2013-10-09

  • 分类号G01B11/00;G01B11/02;G01B11/10;

  • 国家 KR

  • 入库时间 2022-08-21 12:38:22

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