DIGITAL CONTROL FOR A MICRO-ELECTROMECHANICAL ELEMENT

摘要

The present invention relates to a micro-electromechanical device (30), comprising a waveform generator (2) designed to generate a digital control signal for the micro-electromechanical device (30) A control circuit 300 for a micro-electromechanical device 30, including a modulator 3 designed and a digital drive device 4 designed to drive a micro-electromechanical device 30 with an oversampled and noise-).;