AUCOSTIC SENSOR AND METHOD FOR MANUFACTURING MEMBRANE FOR THE AUCOSTIC SENSOR

摘要

The present invention provides an acoustic sensor capable of improving sensibility of the acoustic sensor, and a manufacturing method of a membrane for an acoustic sensor. According to an embodiment of the present invention, the acoustic sensor comprises: a substrate having an acoustic chamber formed at the center; and a membrane arranged to cover the acoustic chamber formed in the substrate. An uneven part having a corrugated structure is provided at an edge of the membrane. The uneven part includes at least one uneven portion. The at least one uneven portion is formed to have a wider corrugated width from an upper surface of the membrane.