VIBRATING INERTIAL SENSOR MANUFACTURING METHOD THEREOF AND VIBRATING INERTIAL SENSOR DEVICE INCLUDING THE SAME

摘要

A vibrating inertial sensor includes: a substrate including an etching region; a piezoelectric thin film positioned on the substrate and formed of a piezoelectric material; a surface acoustic wave generating pattern having patterns facing each other in the direction of a first axis on the piezoelectric thin film, and generating a first surface acoustic wave based on power supplied to both ends of the facing patterns; a metal pattern positioned on the piezoelectric thin film, vibrated by the first surface acoustic wave, and generating a second surface acoustic wave in the direction of a second axis perpendicular to the first axis according to rotational force applied about the first axis; and a surface acoustic wave detecting pattern for receiving the second surface acoustic wave generated by the metal pattern converting the received second surface acoustic wave into an electric signal, wherein the etching region corresponds to a region formed therein with the metal pattern, and a surface of the both surfaces of the piezoelectric thin film, which is opposite to the surface formed thereon with the metal pattern is directly exposed to the outside by the etching region.