System and method for analyzing contaminants in air

摘要

The present invention relates to a pollutant monitoring system and a monitoring method thereof, and more particularly, to a pollutant monitoring system and a monitoring method thereof, in which a transportation enclosure (1) used in a semiconductor manufacturing line or a track- A housing part 100 including a door 110 circulating through a preform formed by the transportation device 10 and capable of being opened and closed at least on one side thereof and a housing part 100 inserted into the housing part 100, And a contamination detecting unit (200) including a sensor for detecting in real time the harmful compounds in the air collected during the process of being transported by the trajectory-type automatic transportation apparatus (10). will be.