LIQUID RECOVERY SYSTEM IMMERSION EXPOSURE APPARATUS IMMERSION EXPOSING METHOD AND DEVICE FABRICATING METHOD

摘要

The liquid recovery system is used as a liquid immersion exposure apparatus. The liquid recovery system includes: a first opening; A cavity portion through which the liquid on the object opposing the first opening can flow through the first opening; A liquid collecting portion for sucking at least a part of the liquid flowing into the gap portion through the porous member; And a second opening different from the first opening. And the air gap is open to the atmosphere through the second opening.