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defect sensing module based on line-beam and defect sensing device using its arrays for detection of the defects on surface
defect sensing module based on line-beam and defect sensing device using its arrays for detection of the defects on surface
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机译:基于线束的缺陷感测模块和使用其阵列的缺陷感测装置以检测表面上的缺陷
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摘要
An object of the present invention is to provide a defect detection module using a line beam and a defect detection device using the defect detection module array, which can dramatically increase a measurement speed while maintaining measurement accuracy by being based on a sheet beam .
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