2 2-D PRECISION MEASURING SYSTEM USING INTERFEROMETER AND VISION

摘要

The present invention relates to a precise measurement system, which comprises: an interferometer measuring a distance of a movable object; a plurality of imaging devices fixed to certain positions, different from each other, and photographing images of an object located in a certain range; a plurality of reference position providers coming in contact with the object and providing a reference position for measurement; and a control apparatus calculating an absolute coordinate for presenting a distance from each reference point of the plurality of reference position providers to each pixel of a plurality of images obtained from the plurality of imaging devices based on the distance measured by the interferometer and the images obtained by the plurality of imaging devices, calculating an absolute distance between the pixels of the images based on the absolute coordinate, and measuring a length of the object photographed by the imaging devices by using the absolute coordinate or the absolute distance.