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APPARATUS FOR ALIGNMENT OF PIVOT POINT USING VISION
APPARATUS FOR ALIGNMENT OF PIVOT POINT USING VISION
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机译:利用视觉对皮沃特点进行校准的装置
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摘要
The present invention relates to an apparatus for inspecting and assembling a precision apparatus, and more particularly, to a pivot point aligning apparatus using vision to precisely set a pivot point of a stage in order to precisely adjust the inclination of a stage on which an inspection target apparatus is placed, A stage in which a socket marked with a recognition mark is mounted on an upper surface thereof; A positioning unit including first rotating means rotating about an x-axis changing a tilt of an upper surface of the stage so that the socket is arranged at a predetermined position in a three-dimensional space, and second rotating means rotating about a y-axis; An adjustment unit for adjusting a position of the stage in a z-axis direction perpendicular to the x-axis, the y-axis, and the upper surface; A vision unit for imaging the recognition mark; And controlling the positioning unit to change the inclination of the stage and to control the vision unit to acquire an image including the recognition mark at a predetermined interval during the change of the inclination of the stage, .
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