A RAMAN SPECTROSCOPY DEVICE COMBINED WITH A EVAPORATION CHAMBER AND A METHOD FOR EVAPORATION AND RAMAN SPECTROSCOPY USING THE SAME

摘要

One embodiment of the present invention provides an apparatus which is combined with a space for performing a deposition process and a space for performing a Raman analysis process, and is blocked from the outside to prevent a deposition part from being oxidized or changed when the deposition part is moved to the Raman analysis process from the deposition process. According to one embodiment of the present invention, a deposition chamber combined Raman spectroscopy comprises: a deposition chamber to provide a deposition space; an analysis chamber to provide a Raman analysis space; a connection passage unit coupled to one side wall of the deposition chamber and one side wall of the analysis chamber, and providing a passage to connect the deposition and analysis chambers; a deposition stage unit coupled to the lower wall of the deposition chamber and supporting a substrate which is a deposition target; a shower head unit coupled to the upper wall of the deposition chamber and injecting gas into the deposition chamber; an analysis stage unit coupled to the lower wall of the analysis chamber and supporting the substrate, which is a Raman analysis target, having the deposition part formed thereon; an analysis light source unit coupled to the other side wall of the analysis chamber and radiating analysis light towards the deposition part; a Raman lens unit collecting scattered light which is the analysis light reflected and scattered by the deposition part, and performing vertical reciprocating movement; a Raman lens driving unit coupled to the upper wall of the analysis chamber and coupled to and linearly moving the Raman lens unit in a vertical direction; and a transfer unit coupled to a side wall of the analysis chamber and transferring the substrate to the deposition or Raman analysis space.