REGENERATION CIRCULATOR HIGH-FREQUENCY POWER SUPPLY DEVICE AND HIGH-FREQUENCY POWER REGENERATION METHOD

摘要

Suppresses an excessive voltage increase due to impedance mismatch on the transmission path, and regenerates high-frequency power. The parallel impedance is connected to the transmission path at the time of the voltage rise, thereby regenerating the voltage by the standing wave, thereby reducing the excess voltage of the load voltage and improving the utilization efficiency of energy. By configuring the parallel impedance with respect to the load impedance on the transmission path between the high-frequency amplifying circuit and the high-frequency load of the high-frequency power supply, the impedance at the connection position is reduced to suppress the generation of excess voltage on the transmission path, Frequency power from the transmission path.