A method of obtaining a wear-resistant coating based on aluminum-magnesium boride

摘要

FIELD: chemical industry.SUBSTANCE: invention relates to the field of wear-resistant coatings based on an aluminum-magnesium boride compound and can be used for the manufacture of tools and various parts. Method of obtaining a wear-resistant coating based on aluminum-magnesium boride on a metal or silicon substrate includes a magnetron sputtering of the stoichiometric composition AlMgBobtained by sintering a target in the vacuum chamber and the coating on the substrate, while the coating on the substrate is carried out in two stages when the distance between the target of the magnetron and the substrate is 10–50 mm, and in the first stage, the application of the lower layer of the coating at a power density of the magnetron discharge of 2–7 W/cm, and in the second stage, applying the top layer of the coating at a discharge power density of 7–20 W/cm.EFFECT: invention makes it possible to obtain smooth films on the substrate, which have a low friction coefficient, high hardness and adhesion to the material of the product.1 cl, 2 dwg, 1 ex