MICRO-OPTO-ELECTRO-MECHANICAL SENSOR OF ANGULAR SPEED BASED ON WAVE SOLID STATE GYROSCOPE WITH RING RESONATOR AND OPTICAL TUNNEL EFFECT

摘要

FIELD: tool engineering.;SUBSTANCE: sensor consists of a control device, a sensor, executed in the form of a ring resonator, pinned on elastic suspensions in a silicon plate, attached to the glass substrate, contact pads, four conductive paths, executed on the neighbouring closely spaced elastic suspensions and partly on a ring resonator, equidistant from each other, a permanent magnet, upper and lower cores. The sensor additionally comprises an information processing unit, four optical transmission and reception channels including a fiber optic coupler connected by light guides to an optical radiation source, an optical radiation receiver, and an optical radiation orientation device. The devices of orientation of optical radiation, executed in the form of rectangular parallelepipeds of quartz glass, are mounted on a glass substrate of the sensitive element with a shift in 45° regarding the centers conducting paths located on the ring resonator at the distance from 1 to 10 microns from the ring resonator covered with gilded mirror, with the exception of a region located opposite the ring resonator and a light absorbing covering is applied on an external ring resonator surface.;EFFECT: improved accuracy.;5 dwg