METHOD FOR FORMING THREE-DIMENSIONAL STRUCTURES OF TOPOLOGICAL ELEMENTS OF FUNCTIONAL LAYERS ON THE SURFACE OF THE SUBSTRATES

摘要

FIELD: manufacturing technology.;SUBSTANCE: essence of the present invention consists in the process of forming three-dimensional structures of the topological elements of the functional layers on the surface of the substrates. Method is based on the application of perspective "additive technology", that is, the topological elements of the functional layer are created on local areas of the substrate by direct deposition of material on them. During the formation of elements, photomasks and photoresistive masks are not used.;EFFECT: goal of the present invention is to increase the repeatability and accuracy of the formation of the topological elements of the functional layers, as well as to increase productivity and reduce the method cost of their obtaining.;1 cl, 3 dwg