Device for measuring an object by means of speckle interferometry and associated method

摘要

Device (1) for measuring an object (2) by means of speckle interferometry, comprising a primary light source (3), a beam splitter (7), the light of the primary light source (3) in an object beam path (4), in which the object (2 ) and a reference beam path (5) and an imaging device (8) imaging optical device, wherein the primary light source (3) emits light, which leads to an incoherent intensity average on the detection device (8) or that the primary light source (3) an averaging device (10, 19) is arranged downstream, which is designed to generate light from the coherent light emitted by the primary light source (3), which leads to incoherent intensity averaging on the detection device (8).