Method and apparatus for resuming the wire sawing process of a workpiece after an unscheduled interruption

摘要

The present invention relates to a method of resuming an interrupted process of sawing a workpiece into a plurality of disks with a wire saw using a cutting wire covered with cutting grain, for example a diamond saw wire. The method according to the invention is illustrated here using the example of a process for sawing a workpiece made of semiconductor material into a plurality of disks with a diamond wire saw, but is also suitable for workpieces made of other materials. In addition, the present invention also includes an apparatus for sawing a workpiece into a plurality of disks with a saw wire, which apparatus enables detection of the position of a wire tear.