Method and device for electrical force measurement by means of insulating thin film

摘要

A device for electrically measuring a force includes a load cell having a first metal electrode and a second metal electrode disposed opposite thereof in the direction of the force, each having contact surfaces in which the force to be measured can be impressed, and electrical resistance in the range of a few milliohms to less than or equal to ten ohms and a mean roughness value (Ra) of less than or equal to 400 nanometers, for forming force-independent conductivity, a thin insulating film disposed between the first and second metal electrodes in a form-locked manner, a reference metal electrode disposed on a section of the thin insulating film such that it is force-decoupled from the first metal electrode and tensioned with respect to the second metal electrode at a constant retaining force by a fastening element, and a measuring circuit designed as a half bridge or a full bridge.