A method and device for grasping a feedback gain of a means of laser tracking - interferometer and laser tracker - interferometer

摘要

A laser interferometer -, - a laser interferometer, a position sensitive detector, the one displacement of a optical axis of the laser - interferometer is detected, a biaxial rotator, the laser - interferometer in any desired direction, an angle sensor, of an angle of rotation of the two-axis rotator is detected, a retro-reflector, of the reflected light in a direction parallel to the incident light is reflected, and a controller, the feedback control of the two-axis rotator the retroreflector, based on signals from said position sensitive detector and the angle sensor, comprises. The means of laser tracking - interferometer begins with the guidance controller when returning light from the retroreflector to a detection range of the position sensitive detector is returned, and changes the gain for the feedback control according to a behavior for a position of the returning light at the position sensitive detector on the basis of the guidance controller.