mems lenkspiegel for applications in integrated photonikschaltungen

摘要

integrated optical assembly, which includes:a optiktru00e4ger, on which a light source to provide a light and a lens, the focus of light which is arranged;an integrated photonikschaltung (pic), with the optiktru00e4ger mechanically coupled to and on a gitterkoppler is arrangedin order to receive the light beam and the beam of light into a waveguide einzukoppeln; anda mikroelektromechaniksystem levels (mems mirrors), designed by the lens, the beam to receive him in the direction of the gitterkopplers redirectwith a position of a reflective part of the mems mirror is customizable to one angle of incidence of light on the gitterkoppler influence.